Femtogram dispersive L3-nanobeam optomechanical cavities: Design and experimental comparison

Jiangjun Zheng; Xiankai Sun; Ying Li; Menno Poot; Ali Dadgar; Norman Nan Shi; Wolfram H.P. Pernice; Hong X. Tang; Chee Wei Wong

doi:10.1364/OE.20.026486

Femtogram dispersive L3-nanobeam optomechanical cavities: Design and experimental comparison

Jiangjun Zheng, Xiankai Sun, Ying Li, Menno Poot, Ali Dadgar, Norman Nan Shi, Wolfram H.P. Pernice, Hong X. Tang, Chee Wei Wong

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

We present the design and experimental comparison of femtogram L3-nanobeam photonic crystal cavities for optomechanical studies. Two symmetric nanobeams are created by placing three air slots in a silicon photonic crystal slab where three holes are removed. The nanobeams' mechanical frequencies are higher than 600 MHz with ultrasmall effective modal masses at approximately 20 femtograms. The optical quality factor (Q) is optimized up to 53,000. The optical and mechanical modes are dispersively coupled with a vacuum optomechanical coupling rate g0/2π exceeding 200 kHz. The anchor-loss-limited mechanical Q of the differential beam mode is evaluated to be greater than 10,000 for structures with ideally symmetric beams. The influence of variations on the air slot width and position is also investigated. The devices can be used as ultrasensitive sensors of mass, force, and displacement.

Original language	English
Pages (from-to)	26486-26498
Number of pages	13
Journal	Optics Express
Volume	20
Issue number	24
DOIs	https://doi.org/10.1364/OE.20.026486
State	Published - 19 Nov 2012
Externally published	Yes

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title = "Femtogram dispersive L3-nanobeam optomechanical cavities: Design and experimental comparison",

abstract = "We present the design and experimental comparison of femtogram L3-nanobeam photonic crystal cavities for optomechanical studies. Two symmetric nanobeams are created by placing three air slots in a silicon photonic crystal slab where three holes are removed. The nanobeams' mechanical frequencies are higher than 600 MHz with ultrasmall effective modal masses at approximately 20 femtograms. The optical quality factor (Q) is optimized up to 53,000. The optical and mechanical modes are dispersively coupled with a vacuum optomechanical coupling rate g0/2π exceeding 200 kHz. The anchor-loss-limited mechanical Q of the differential beam mode is evaluated to be greater than 10,000 for structures with ideally symmetric beams. The influence of variations on the air slot width and position is also investigated. The devices can be used as ultrasensitive sensors of mass, force, and displacement.",

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AU - Zheng, Jiangjun

AU - Sun, Xiankai

AU - Li, Ying

AU - Poot, Menno

AU - Dadgar, Ali

AU - Shi, Norman Nan

AU - Pernice, Wolfram H.P.

AU - Tang, Hong X.

AU - Wong, Chee Wei

PY - 2012/11/19

Y1 - 2012/11/19

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AB - We present the design and experimental comparison of femtogram L3-nanobeam photonic crystal cavities for optomechanical studies. Two symmetric nanobeams are created by placing three air slots in a silicon photonic crystal slab where three holes are removed. The nanobeams' mechanical frequencies are higher than 600 MHz with ultrasmall effective modal masses at approximately 20 femtograms. The optical quality factor (Q) is optimized up to 53,000. The optical and mechanical modes are dispersively coupled with a vacuum optomechanical coupling rate g0/2π exceeding 200 kHz. The anchor-loss-limited mechanical Q of the differential beam mode is evaluated to be greater than 10,000 for structures with ideally symmetric beams. The influence of variations on the air slot width and position is also investigated. The devices can be used as ultrasensitive sensors of mass, force, and displacement.

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Femtogram dispersive L3-nanobeam optomechanical cavities: Design and experimental comparison

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