@inproceedings{667ca01174444b72b4d683f9d9c0a221,
title = "FEM-Absch{\"a}tzung f{\"u}r die Stabilit{\"a}t eines opto-mechanischen Phasenschiebers",
abstract = "Photonic Integrated Circuits (PICs) offer a large number of industrial solutions through the use of already established knowledge in the fields of integrated circuits and MEMS. In this work we present a simulation of an optical phaseshifter, where an optical power induces mechanical actuation. Such a system may offer an optical phaseshifter with low losses in comparison to electro-optical phaseshifters. We calculate the stability condition of the phaseshifter using an FEM model and present the results. Our model provides a more accurate prediction of the stability condition of an optical phaseshifter, as we couple the optical boundaries of the optical beams in the waveguide, thus, accounting for all the internal force in the waveguide.",
author = "M. Ashour and Weig, {E. M.} and Caspers, {J. N.}",
note = "Publisher Copyright: {\textcopyright} VDE VERLAG GMBH · Berlin · Offenbach; MikroSystemTechnik Kongress 2019: Mikroelektronik, MEMS-MOEMS, Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz - MikroSystemTechnik Congress 2019: Microelectronics, MEMS-MOEMS, System Integration - Pillars of Digitization and Artificial Intelligence ; Conference date: 28-10-2019 Through 30-10-2019",
year = "2019",
language = "Deutsch",
series = "MikroSystemTechnik Kongress 2019 - Mikroelektronik MEMS-MOEMS Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings",
publisher = "VDE VERLAG GMBH",
pages = "680--682",
booktitle = "MikroSystemTechnik Kongress 2019 - Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings",
}