Fabrication of ZrO 2 and ZrN films by metalorganic chemical vapor deposition employing new Zr precursors

Manish Banerjee, Nagendra Babu Srinivasan, Huaizhi Zhu, Sun Ja Kim, Ke Xu, Manuela Winter, Hans Werner Becker, Detlef Rogalla, Teresa De Los Arcos, Daniela Bekermann, Davide Barreca, Roland A. Fischer, Anjana Devi

Research output: Contribution to journalArticlepeer-review

36 Scopus citations

Fingerprint

Dive into the research topics of 'Fabrication of ZrO 2 and ZrN films by metalorganic chemical vapor deposition employing new Zr precursors'. Together they form a unique fingerprint.

Engineering

Material Science

Chemical Engineering

Keyphrases