Fabrication of NMR - microsensors for nanoliter sample volumes

J. Dechow, A. Forchel, T. Lanz, A. Haase

Research output: Contribution to journalConference articlepeer-review

47 Scopus citations


The fabrication of micro-sensors for NMR-spectroscopy on both glass and GaAs is presented. Planar coils with inner diameter from 50 μm to 400 μm including a coplanar wave-guide leading to the bonding pads were combined with a chamber for liquid samples of 200-500 μm diameter on the backside of the substrate. The microcoil served as a receiver in a 1H-NMR experiment at 11T (500 MHz). In initial experiments, the spectrum of 60 nl-volumes of pure silicone-oil were detected by the microcoil.

Original languageEnglish
Pages (from-to)517-519
Number of pages3
JournalMicroelectronic Engineering
Issue number1
StatePublished - Jun 2000
Externally publishedYes
Event25th International Conference on Micro- and Nano-Engineering - Rome, Italy
Duration: 21 Sep 199923 Sep 1999


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