Fabrication of LIGA-acceleration sensors by aligned molding

A technology for the fabrication of movable LIGA-Microstructures by molding was developed, which enables the cheaper production of e.g. LIGA-Acceleration Sensors [1]. For this purpose an aligned molding process had to be developed. The realized experimental setup consists of two subsystems, the molding machine and the alignment arrangement [2]. After aligning a substrate it is transported into the molding machine. An effective and extremely precise dimension translation system is required. Although during molding temperature changes appear and high forces are applied, the dimension stability during the molding process has to be guaranteed. The presented system and setup deals successfully with these conditions. An alignment quality of ±10 μm is realized. Using the aligned molding technology temperature compensated LIGA-acceleration sensors [1] were fabricated. The proper function of the sensors was demonstrated.