Fabrication of Fresnel zone plates for hard X-rays

K. Jefimovs; O. Bunk; F. Pfeiffer; D. Grolimund; J. F. van der Veen; C. David

doi:10.1016/j.mee.2007.01.112

Fabrication of Fresnel zone plates for hard X-rays

K. Jefimovs
, O. Bunk
, F. Pfeiffer
, D. Grolimund
, J. F. van der Veen
, C. David

Paul Scherrer Institut

Research output: Contribution to journal › Article › peer-review

55 Scopus citations

Abstract

A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100 nm and structures of 1 μm height are fabricated. Preliminary focusing results at an X-ray energy of 8 keV are presented and ways to improve the zone plate parameters are discussed.

Original language	English
Pages (from-to)	1467-1470
Number of pages	4
Journal	Microelectronic Engineering
Volume	84
Issue number	5-8
DOIs	https://doi.org/10.1016/j.mee.2007.01.112
State	Published - May 2007
Externally published	Yes

Keywords

Electron beam lithography
Electroplating
Focusing
Fresnel zone plate
Hard X-rays
X-ray microscopy

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10.1016/j.mee.2007.01.112

Cite this

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title = "Fabrication of Fresnel zone plates for hard X-rays",

abstract = "A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100 nm and structures of 1 μm height are fabricated. Preliminary focusing results at an X-ray energy of 8 keV are presented and ways to improve the zone plate parameters are discussed.",

keywords = "Electron beam lithography, Electroplating, Focusing, Fresnel zone plate, Hard X-rays, X-ray microscopy",

author = "K. Jefimovs and O. Bunk and F. Pfeiffer and D. Grolimund and \{van der Veen\}, \{J. F.\} and C. David",

note = "Funding Information: This work was funded by EU project “Integrating Activity on Synchrotron and Free Electron Laser Science Contract” under the contract Nr. RII3-CT-2004-506008 part JRA3. The X-ray experiments were performed at the Swiss Light Source SLS. We would like to thank Anja Weber for assistance in substrate preparation, Roger Bischofberger for valuable discussions about electroplating and Beat Meier for assistance during experiments.",

year = "2007",

month = may,

doi = "10.1016/j.mee.2007.01.112",

language = "English",

volume = "84",

pages = "1467--1470",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "5-8",

}

TY - JOUR

T1 - Fabrication of Fresnel zone plates for hard X-rays

AU - Jefimovs, K.

AU - Bunk, O.

AU - Pfeiffer, F.

AU - Grolimund, D.

AU - van der Veen, J. F.

AU - David, C.

N1 - Funding Information: This work was funded by EU project “Integrating Activity on Synchrotron and Free Electron Laser Science Contract” under the contract Nr. RII3-CT-2004-506008 part JRA3. The X-ray experiments were performed at the Swiss Light Source SLS. We would like to thank Anja Weber for assistance in substrate preparation, Roger Bischofberger for valuable discussions about electroplating and Beat Meier for assistance during experiments.

PY - 2007/5

Y1 - 2007/5

N2 - A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100 nm and structures of 1 μm height are fabricated. Preliminary focusing results at an X-ray energy of 8 keV are presented and ways to improve the zone plate parameters are discussed.

AB - A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100 nm and structures of 1 μm height are fabricated. Preliminary focusing results at an X-ray energy of 8 keV are presented and ways to improve the zone plate parameters are discussed.

KW - Electron beam lithography

KW - Electroplating

KW - Focusing

KW - Fresnel zone plate

KW - Hard X-rays

KW - X-ray microscopy

UR - https://www.scopus.com/pages/publications/34247627946

U2 - 10.1016/j.mee.2007.01.112

DO - 10.1016/j.mee.2007.01.112

M3 - Article

AN - SCOPUS:34247627946

SN - 0167-9317

VL - 84

SP - 1467

EP - 1470

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-8

ER -

Fabrication of Fresnel zone plates for hard X-rays

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Keywords

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