@article{7b30731154144094bf8a1bfadafe47ea,
title = "Fabrication of Fresnel zone plates for hard X-rays",
abstract = "A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100 nm and structures of 1 μm height are fabricated. Preliminary focusing results at an X-ray energy of 8 keV are presented and ways to improve the zone plate parameters are discussed.",
keywords = "Electron beam lithography, Electroplating, Focusing, Fresnel zone plate, Hard X-rays, X-ray microscopy",
author = "K. Jefimovs and O. Bunk and F. Pfeiffer and D. Grolimund and {van der Veen}, {J. F.} and C. David",
note = "Funding Information: This work was funded by EU project “Integrating Activity on Synchrotron and Free Electron Laser Science Contract” under the contract Nr. RII3-CT-2004-506008 part JRA3. The X-ray experiments were performed at the Swiss Light Source SLS. We would like to thank Anja Weber for assistance in substrate preparation, Roger Bischofberger for valuable discussions about electroplating and Beat Meier for assistance during experiments.",
year = "2007",
month = may,
doi = "10.1016/j.mee.2007.01.112",
language = "English",
volume = "84",
pages = "1467--1470",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier B.V.",
number = "5-8",
}