Exploration of the Mass Sensitivity of Quartz Crystal Microbalance under Overtone Modes Using Electrodeposition Method

With the in-depth application of quartz crystal microbalance (QCM) sensors in the fields of science and engineering, there is an urgent need for QCM sensors with high mass sensitivity. The mass sensitivity of a QCM is closely related to its resonance frequency, and the high resonance frequency leads to improve its mass sensitivity. However, the resonance frequency of a QCM resonator cannot be increased all the time due to the fragility of quartz wafer and the limits of energy trapping effect. Few studies are associated with mass sensitivity of a QCM resonator under overtone modes. Herein, we propose to make a QCM resonator work in its n-th overtone (n = 3, 5, 7, 9 in this study) mode to increase its resonance frequency during operating. Thereby, the purpose of improving QCM mass sensitivity is achieved, and the mass sensitivity of a QCM working in the n-th overtone mode can be called as n-th overtone mass sensitivity. Then, the n-th overtone mass sensitivity of a QCM sensor is measured by an electrodeposition method. The experimental results show that the n-th overtone mass sensitivity of a QCM is a bit more than n times that of the fundamental mass sensitivity, and it is consistent with the theoretical calculation results. The application of overtone mass sensitivity will greatly improve the sensitivity of QCM sensors, which is very attractive for the research fields that require QCM sensors with high sensitivity.