Explanation and quantitative model for the matching behavior of poly-silicon resistors

Roland Thewes, Ralf Brederlow, Claus Dahl, Ute Kollmer, Carsten G. Linnenbank, Birgit Holzapfl, Jan Becker, Jens Kissing, Sylvia Kessel, Werner Weber

Research output: Contribution to journalConference articlepeer-review

20 Scopus citations

Abstract

We investigate the matching behavior of poly-silicon resistors. Experimental results from an analog CMOS process with three poly-silicon options are discussed and compared with a quantitative model which is developed using fit parameter-free analytical calculations and Monte-Carlo simulations. It is found that mismatch is directly proportional to the grain size. A relation is derived that allows to optimize devices for low mismatch circuit applications.

Original languageEnglish
Pages (from-to)771-774
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1998 IEEE International Electron Devices Meeting - San Francisco, CA, USA
Duration: 6 Dec 19989 Dec 1998

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