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Everything at Once - Linearizing System Response and Enhancing Sensitivity in Photoacoustic Gas Sensors by Dedicated Demodulation and Filter Tuning Methods

  • Simon Essing
  • , David Tumpold
  • , Guillaume Dumas
  • , Andrey Kravchenko
  • , Mohammadamir Ghaderi
  • , Gabriele Schrag
  • Technical University of Munich
  • Infineon Technologies AG

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present a sophisticated method for improving the sensitivity of CO2-detecting non-resonant MEMS-based photoacoustic gas spectroscopy systems by more than 50 % compared to state-of-the-art approaches. The method based on signal demodulation can also be used to linearize the measured system's response in order to reduce the calibration effort for future sensors. Tuning the filter transmission spectra accordingly is utilized to further increase the linearity of the system response and enhancing the sensitivity by more than 200 %.

Original languageEnglish
Title of host publication2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1648-1651
Number of pages4
ISBN (Electronic)9784886864352
StatePublished - 2023
Event22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan
Duration: 25 Jun 202329 Jun 2023

Publication series

Name2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/TerritoryJapan
CityKyoto
Period25/06/2329/06/23

Keywords

  • Bragg filter
  • demodulation
  • photoacoustic gas sensors
  • signal analysis
  • system simulation

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