@inproceedings{e45217f2fa1e4219a70912f637f7dd69,
title = "Entwicklung eines bionisch inspirierten, mikromechanischen Biegewandlers f{\"u}r effizienten fluidischen Massentransport",
abstract = "A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology. The results of piezoelectric-mechanical simulations prove that an undulatory motion of the fin-like micro-flapper can be generated. Subsequent fluidic investigations show, that this motion pattern yields a significant higher, directed fluidic net flow compared to resonant-like motion. First prototypes have been manufactured and characterized applying laser Doppler vibrometry and white light interferometry.",
author = "R. Behlert and M. Gehring and H. Mehner and R. Wieland and G. Schrag",
note = "Publisher Copyright: {\textcopyright} 2017 MEMS.All right reserved.; MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2017: MEMS, Microelectronics, Systems ; Conference date: 23-10-2017 Through 25-10-2017",
year = "2017",
language = "Deutsch",
series = "MikroSystemTechnik Kongress 2017 {"}MEMS, Mikroelektronik, Systeme{"}, Proceedings",
publisher = "VDE VERLAG GMBH",
pages = "207--210",
booktitle = "MikroSystemTechnik Kongress 2017 {"}MEMS, Mikroelektronik, Systeme{"}, Proceedings",
}