Enhanced design of microsystems by combining lumped and distributed system-level models

Keyphrases

• System Level 100%
• Distributed Systems 100%
• Microsystems 100%
• Lumped System 100%
• System-level Model 100%
• Microphone 50%
• Signal-to-noise Ratio 50%
• Acoustics 50%
• Frequency Response 50%
• Design Parameters 50%
• System Modeling 50%
• Modeling Approach 50%
• Derived Model 50%
• Computational Expense 50%
• Simulation Approach 50%
• Electronic Circuit 50%
• Lumped Element Model 50%
• System Operation 50%
• Device Operation 50%
• Viscous Damping 50%
• Total Harmonic Distortion 50%
• Predictive Simulation 50%
• Antipodal 50%
• Mixed-level Simulation 50%
• MEMS Systems 50%
• Silicon Microphone 50%
• MEMS Devices 50%
• Distributed Effects 50%
• Capacitance Variation 50%
• Distributed Element Model 50%

Engineering

• Capacitive 100%
• Signal-to-Noise Ratio 100%
• Design Parameter 100%
• Measured Data 100%
• Element Model 100%
• Microelectromechanical System 100%
• Microsystem 100%
• System Operation 100%
• Total Harmonic Distortion 100%
• Level Model 100%
• Computational Expense 100%
• Electronic Circuitry 100%
• Frequency Response 100%
• Figure of Merit 100%