Energy-Efficient Semiconductor Manufacturing: Establishing an Ecological Operating Curve

Anna Hopf, Abdelgafar Ismail, Hans Ehm, Daniel Schneider, Gunther Reinhart

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Latest governmental policies aim to mitigate the carbon impact on climate and accelerate the transition towards carbon neutrality by imposing stronger regulations for companies. The semiconductor industry emits carbon dioxide caused by its large amounts of consumed energy. At the same time, machine sensors tracking consumption are rare, and the share of fixed and variable energy consumption is often unknown. To detect the individual energy consumption types of a wafer fab, a process- and infrastructure-oriented discrete-event simulation model is developed that serves as a tool to determine the plant energy consumption within a fab. The obtained shares are validated with existing data. In parallel, a novel enery efficiency curve is constructed and verified by extending the concept of the well-studied Operating Curve. It incorporates the relationship between utilization and energy efficiency and adds an ecological viewpoint to the so far only economically motivated concept.

Original languageEnglish
Title of host publicationProceedings of the 2022 Winter Simulation Conference, WSC 2022
EditorsB. Feng, G. Pedrielli, Y. Peng, S. Shashaani, E. Song, C.G. Corlu, L.H. Lee, E.P. Chew, T. Roeder, P. Lendermann
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages3453-3464
Number of pages12
ISBN (Electronic)9798350309713
DOIs
StatePublished - 2022
Event2022 Winter Simulation Conference, WSC 2022 - Guilin, China
Duration: 11 Dec 202214 Dec 2022

Publication series

NameProceedings - Winter Simulation Conference
Volume2022-December
ISSN (Print)0891-7736

Conference

Conference2022 Winter Simulation Conference, WSC 2022
Country/TerritoryChina
CityGuilin
Period11/12/2214/12/22

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