Empirical modeling of the refractive index for (AlGaIn)As lattice matched to InP

C. Grasse, G. Boehm, M. Mueller, T. Gruendl, R. Meyer, M. C. Amann

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A composition-dependent empirical interpolation formula for the refractive index of AlGaInAs epilayers lattice matched to InP substrate has been determined by using a reflection spectroscopy technique. The 2 νm thick (AlGaIn)As layers have been grown by MBE as well as MOVPE and were characterized by x-ray diffractometry and photoluminescence measurements. The measured data from these etalon structures were fitted by using a Sellmeier equation (single oscillator model) to retrieve the refraction index for wavelengths between 2.5 and 1 νm. The resulting accurate expression will be very useful for designing optoelectronic devices like VCSELs.

Original languageEnglish
Article number045018
JournalSemiconductor Science and Technology
Issue number4
StatePublished - 2010


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