Elucidating the Evolving Atomic Structure in Atomic Layer Deposition Reactions with in Situ XANES and Machine Learning

Orlando Trejo, Anup L. Dadlani, Francisco De La Paz, Shinjita Acharya, Rob Kravec, Dennis Nordlund, Ritimukta Sarangi, Fritz B. Prinz, Jan Torgersen, Neil P. Dasgupta

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23 Scopus citations

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Material Science

Engineering