Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in

V. Rochus; D. J. Rixen; J. C. Golinval

doi:10.1016/j.na.2005.01.055

Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in

V. Rochus, D. J. Rixen, J. C. Golinval

Research output: Contribution to journal › Article › peer-review

65 Scopus citations

Abstract

In micro-electromechanical systems (MEMS), coupling of structures through electrostatic forces is a primordial phenomenon. Simulating the dynamics of MEMS and taking into account such strong coupling effects allows one to predict dynamical performance and stability, and is therefore an essential issue in the design of highly effective and reliable devices. Analysis techniques for such systems require special attention in order to provide to the designer accurate and fast tools. We propose a finite element approach (FEM) that properly handles the strong electromechanical coupling in MEMS. In the simulation example of a micro-bridge, we show that such simulation techniques can reveal complex dynamical behaviors of MEMS such as dynamic pull-in.

Original language	English
Pages (from-to)	e1619-e1633
Journal	Nonlinear Analysis, Theory, Methods and Applications
Volume	63
Issue number	5-7
DOIs	https://doi.org/10.1016/j.na.2005.01.055
State	Published - 30 Nov 2005
Externally published	Yes

Keywords

Dynamics
Electromechanical coupling
Finite element
Micro-systems
Pull-in

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10.1016/j.na.2005.01.055

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@article{2f3f87255929422b90f9b2d31ea5ac86,

title = "Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in",

abstract = "In micro-electromechanical systems (MEMS), coupling of structures through electrostatic forces is a primordial phenomenon. Simulating the dynamics of MEMS and taking into account such strong coupling effects allows one to predict dynamical performance and stability, and is therefore an essential issue in the design of highly effective and reliable devices. Analysis techniques for such systems require special attention in order to provide to the designer accurate and fast tools. We propose a finite element approach (FEM) that properly handles the strong electromechanical coupling in MEMS. In the simulation example of a micro-bridge, we show that such simulation techniques can reveal complex dynamical behaviors of MEMS such as dynamic pull-in.",

keywords = "Dynamics, Electromechanical coupling, Finite element, Micro-systems, Pull-in",

author = "V. Rochus and Rixen, {D. J.} and Golinval, {J. C.}",

note = "Funding Information: The first author acknowledges the financial support of the Belgian National Fund for Scientific Research. The second author is thankful to the Koiter Institute of the Delft University of Technology for its financial support.",

year = "2005",

month = nov,

day = "30",

doi = "10.1016/j.na.2005.01.055",

language = "English",

volume = "63",

pages = "e1619--e1633",

journal = "Nonlinear Analysis, Theory, Methods and Applications",

issn = "0362-546X",

publisher = "Elsevier Ltd.",

number = "5-7",

}

TY - JOUR

T1 - Electrostatic coupling of MEMS structures

T2 - Transient simulations and dynamic pull-in

AU - Rochus, V.

AU - Rixen, D. J.

AU - Golinval, J. C.

N1 - Funding Information: The first author acknowledges the financial support of the Belgian National Fund for Scientific Research. The second author is thankful to the Koiter Institute of the Delft University of Technology for its financial support.

PY - 2005/11/30

Y1 - 2005/11/30

N2 - In micro-electromechanical systems (MEMS), coupling of structures through electrostatic forces is a primordial phenomenon. Simulating the dynamics of MEMS and taking into account such strong coupling effects allows one to predict dynamical performance and stability, and is therefore an essential issue in the design of highly effective and reliable devices. Analysis techniques for such systems require special attention in order to provide to the designer accurate and fast tools. We propose a finite element approach (FEM) that properly handles the strong electromechanical coupling in MEMS. In the simulation example of a micro-bridge, we show that such simulation techniques can reveal complex dynamical behaviors of MEMS such as dynamic pull-in.

AB - In micro-electromechanical systems (MEMS), coupling of structures through electrostatic forces is a primordial phenomenon. Simulating the dynamics of MEMS and taking into account such strong coupling effects allows one to predict dynamical performance and stability, and is therefore an essential issue in the design of highly effective and reliable devices. Analysis techniques for such systems require special attention in order to provide to the designer accurate and fast tools. We propose a finite element approach (FEM) that properly handles the strong electromechanical coupling in MEMS. In the simulation example of a micro-bridge, we show that such simulation techniques can reveal complex dynamical behaviors of MEMS such as dynamic pull-in.

KW - Dynamics

KW - Electromechanical coupling

KW - Finite element

KW - Micro-systems

KW - Pull-in

UR - http://www.scopus.com/inward/record.url?scp=28044435839&partnerID=8YFLogxK

U2 - 10.1016/j.na.2005.01.055

DO - 10.1016/j.na.2005.01.055

M3 - Article

AN - SCOPUS:28044435839

SN - 0362-546X

VL - 63

SP - e1619-e1633

JO - Nonlinear Analysis, Theory, Methods and Applications

JF - Nonlinear Analysis, Theory, Methods and Applications

IS - 5-7

ER -

Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in

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Keywords

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