Electro-thermo-mechanical field analysis using SESES

J. Funk, J. G. Korvink, G. Wachutka, H. Baltes

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We describe our simulation framework for coupled electro-thermo-mechanical (ETM) analysis of miniaturized transducers and electronic devices. The package is tailored to the specific requirements of micro-electro-mechanical structure design. It achieves high computational accuracy and performance on engineering workstations through the use of an automatic mesh adaptation algorithm [1]. A zone-coupling scheme allows for a considerable reduction of degrees of freedom (Dofs). A fast linear solver coupled with near-optimal finite element data structures enables the solution of complex devices with up to 100,000 finite elements on a workstation.

Original languageEnglish
Title of host publicationEuropean Solid-State Device Research Conference
EditorsPeter Ashburn, Chris Hill
PublisherIEEE Computer Society
Pages347-350
Number of pages4
ISBN (Electronic)2863321579
StatePublished - 1994
Externally publishedYes
Event24th European Solid State Device Research Conference, ESSDERC 1994 - Edinburgh, United Kingdom
Duration: 11 Sep 199415 Sep 1994

Publication series

NameEuropean Solid-State Device Research Conference
ISSN (Print)1930-8876

Conference

Conference24th European Solid State Device Research Conference, ESSDERC 1994
Country/TerritoryUnited Kingdom
CityEdinburgh
Period11/09/9415/09/94

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