Einfluss der Verbindungstechnologie auf das Auslenkverhalten von gesteuerten Mikromembranaktoren

In the last few years, new piezoelectric micromembrane actuators were presented, which were controlled by single side electrodes. Ring- and star shaped electrode layouts on PZT surface were mainly used. Under certain conditions, the star shaped actuators showed convexe deformation in the direction of the active surface; i.e., the surface containing the electrodes. This was achieved by a fixed clamping, which imposed this movement. In order to do this, a silicon wafer was bonded using an epoxy layer on active PZT surface. This type of joining technique has an influence regarding the deformation characteristics of these actuators, which is discussed in this paper.