Effizientes chemisch-mechanisches Polieren (CMP) Gesteigerte Effizienz durch kleine Mengen anforderungsgerecht ausgewählter konditionierter Poliersuspensionen

Translated title of the contribution: Efficient chemo-mechanical polishing - Greater efficiency by small amounts of well-elected and conditioned polishing suspension

C. Trum, R. Rascher, M. Zäh

Research output: Contribution to journalArticlepeer-review

Abstract

Chemo-mechanical polishing plays a vital role in the production of highly precise, optically effective surfaces. The polishing suspension for this is usually prepared for all processes in one place. Thus, it is not possible to adjust the suspension in type and condition to the materials to be processed. This article addresses the opportunities and challenges offered by using small amounts of selectively conditioned polishing slurry.

Translated title of the contributionEfficient chemo-mechanical polishing - Greater efficiency by small amounts of well-elected and conditioned polishing suspension
Original languageGerman
Pages (from-to)174-179
Number of pages6
JournalWT Werkstattstechnik
Volume108
Issue number3
StatePublished - 2018

Fingerprint

Dive into the research topics of 'Efficient chemo-mechanical polishing - Greater efficiency by small amounts of well-elected and conditioned polishing suspension'. Together they form a unique fingerprint.

Cite this