Efficient Modeling of Acoustic Channels-Towards Tailored Frequency Response of Airborne Ultrasonic MEMS Transducers

Gabriele Bosetti, Gabriele Schrag

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

We present a fully-parametrized physics-based analytical methodology for the fast computation of the acoustic behavior of mm-sized circular acoustic channels with spatially varying radius. The presented algebraic method achieves accuracies comparable to state-of-The-Art FEM simulations for frequencies between 10 Hz and 100 kHz, while reducing the computational time by a factor of more than 3000. Thanks to its glass-box nature, this method can be used for a wide range of applications such as the design optimization of acoustic channels to achieve a target operating frequency for a given MEMS-based ultrasonic system as well as to tailor the shape of its entire frequency response.

Original languageEnglish
Title of host publication2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665458368
DOIs
StatePublished - 2022
Event23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2022 - St Julian, Malta
Duration: 25 Apr 202227 Apr 2022

Publication series

Name2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2022

Conference

Conference23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2022
Country/TerritoryMalta
CitySt Julian
Period25/04/2227/04/22

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