Abstract
An overview is given on several XAFS studies of different Ge nanostructures, namely, Ge QDs grown on Si(100) by molecular beam epitaxy (MBE), Ge nanocrystals embedded in SiO2, and Ge nanoislands formed on Si(111) with a thin SiO2 coverage. The results demonstrate that the local structure of Ge is different in the free cases and, when the same fabrication technique is used, is very sensitive to the growth conditions.
Original language | English |
---|---|
Pages (from-to) | 1116-1119 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films |
Volume | 20 |
Issue number | 3 |
DOIs | |
State | Published - May 2002 |