Effect of the interface on the local structure of Ge-Si nanostructures

A. V. Kolobov, H. Oyanagi, K. Brunner, G. Abstreiter, Y. Maeda, A. A. Shklyaev, S. Yamasaki, M. Ichikawa, K. Tanaka

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11 Scopus citations

Abstract

An overview is given on several XAFS studies of different Ge nanostructures, namely, Ge QDs grown on Si(100) by molecular beam epitaxy (MBE), Ge nanocrystals embedded in SiO2, and Ge nanoislands formed on Si(111) with a thin SiO2 coverage. The results demonstrate that the local structure of Ge is different in the free cases and, when the same fabrication technique is used, is very sensitive to the growth conditions.

Original languageEnglish
Pages (from-to)1116-1119
Number of pages4
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume20
Issue number3
DOIs
StatePublished - May 2002

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