Effect of actuation signal on single stroke volume in metal micro diaphragm pumps

Micropumps are a key component for many microfluidic applications, because of their ability to accurately transport tiny amounts of fluids. In this paper we investigate the influence of the pump driving signal on Fraunhofer EMFT’s steel micro diaphragm pumps using a parameter study. The varied parameters include actuation signal shape and slew rate, signal amplitude and signal frequency. For each set of parameters, at least ten gravimetric measurements are taken to determine the dosed volume per stroke. Using a signal amplitude of +300 V /-80 V, a stroke volume of 11.1±0.1 µl was achieved. This stroke volume decreases linearly down to 5.0±0.5 µl at an amplitude of +80 V /-80 V. The flank steepness only had an influence on the dosed volume when it was slower than a 60 Hz sine. Actuation frequency itself had a negligible influence on the dosed volume as long as it was below 20 Hz.