Editorial

Research output: Contribution to journal › Editorial

Original language	English
Pages (from-to)	viii-ix
Journal	Microelectronic Engineering
Volume	141
DOIs	https://doi.org/10.1016/S0167-9317(15)00378-0
State	Published - 19 May 2015
Externally published	Yes

Access to Document

@article{ef68ff488f0f471fbbcfedffbbb61749,

title = "Editorial",

author = "Helmut Schift and Rupp, \{Jennifer L.M.\}",

year = "2015",

month = may,

day = "19",

doi = "10.1016/S0167-9317(15)00378-0",

language = "English",

volume = "141",

pages = "viii--ix",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Editorial

AU - Schift, Helmut

AU - Rupp, Jennifer L.M.

PY - 2015/5/19

Y1 - 2015/5/19

UR - https://www.scopus.com/pages/publications/84929347320

U2 - 10.1016/S0167-9317(15)00378-0

DO - 10.1016/S0167-9317(15)00378-0

M3 - Editorial

AN - SCOPUS:84929347320

SN - 0167-9317

VL - 141

SP - viii-ix

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -