Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS
Kristian A. Reck, Yusuf Bulut, Zhuijun Xu, Suzhe Liang, Thomas Strunskus, Benedikt Sochor, Holger Gerdes, Ralf Bandorf, Peter Müller-Buschbaum, Stephan V. Roth, Alexander Vahl, Franz Faupel
Research output: Contribution to journal › Article › peer-review
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