TY - GEN
T1 - Dynamic characteristics of novel super-junction LDMOS switches under charge imbalance conditions
AU - Permthammasin, K.
AU - Wachutka, G.
AU - Schmitt, M.
AU - Kapels, H.
PY - 2006
Y1 - 2006
N2 - The inductive switching performance of a smart super-junction (SJ) LDMOS switch is simulated and analysed, together with the reverse recovery properties of its internal diode. The SJ power switch under investigation differs from the conventional one in the so-called SJ structure which, in this case, consists of an array of p-type round pillars embedded in the ntype drift region. In view of the tolerances achievable in the present fabrication technology, the effect of slightly unbalanced doping charges in the SJ structure is of utmost importance and, hence, studied in detail. Two different SJ structures have been designed to tackle the effect of substrate-aided depletion on the blocking capability of the SJ switch. The 3D-simulation results reveal that a proper design of the SJ structure not only suppresses the substrate effect, but also enhances the switching capability of the SJ switch.
AB - The inductive switching performance of a smart super-junction (SJ) LDMOS switch is simulated and analysed, together with the reverse recovery properties of its internal diode. The SJ power switch under investigation differs from the conventional one in the so-called SJ structure which, in this case, consists of an array of p-type round pillars embedded in the ntype drift region. In view of the tolerances achievable in the present fabrication technology, the effect of slightly unbalanced doping charges in the SJ structure is of utmost importance and, hence, studied in detail. Two different SJ structures have been designed to tackle the effect of substrate-aided depletion on the blocking capability of the SJ switch. The 3D-simulation results reveal that a proper design of the SJ structure not only suppresses the substrate effect, but also enhances the switching capability of the SJ switch.
UR - http://www.scopus.com/inward/record.url?scp=77956540333&partnerID=8YFLogxK
U2 - 10.1109/ICMEL.2006.1650926
DO - 10.1109/ICMEL.2006.1650926
M3 - Conference contribution
AN - SCOPUS:77956540333
SN - 1424401178
SN - 9781424401178
T3 - 2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings
SP - 187
EP - 190
BT - 2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings
PB - IEEE Computer Society
T2 - 2006 25th International Conference on Microelectronics, MIEL 2006
Y2 - 14 May 2006 through 17 May 2006
ER -