Development and characterization of an atmospheric-pressure microwave plasma torch

Martina Leins; Anderas Schulz; Matthias Walker; Uwe Schumacher; Ulrich Stroth

doi:10.1109/TPS.2008.924420

Development and characterization of an atmospheric-pressure microwave plasma torch

Martina Leins
, Anderas Schulz
, Matthias Walker
, Uwe Schumacher
, Ulrich Stroth

Universität Stuttgart

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

The presented microwave plasma torch finds application in many areas of treatment and conversion of different gases as well as in surface treatment. The torch is based on an axially symmetric resonator. Microwaves of 2.45 GHz are fed into the cavity, resulting in a sufficient high electric field for ignition and maintaining stable plasma operation. The characterization of the plasma is performed by optical-emission spectroscopy, which revealed a rotational temperature of about 3600 K in the center of the plasma.

Original language	English
Pages (from-to)	982-983
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	36
Issue number	4 PART 1
DOIs	https://doi.org/10.1109/TPS.2008.924420
State	Published - Aug 2008
Externally published	Yes

Keywords

Atmospheric pressure
Decomposition of VOC
Microwave plasma source
Optical emission spectroscopy

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10.1109/TPS.2008.924420

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title = "Development and characterization of an atmospheric-pressure microwave plasma torch",

abstract = "The presented microwave plasma torch finds application in many areas of treatment and conversion of different gases as well as in surface treatment. The torch is based on an axially symmetric resonator. Microwaves of 2.45 GHz are fed into the cavity, resulting in a sufficient high electric field for ignition and maintaining stable plasma operation. The characterization of the plasma is performed by optical-emission spectroscopy, which revealed a rotational temperature of about 3600 K in the center of the plasma.",

keywords = "Atmospheric pressure, Decomposition of VOC, Microwave plasma source, Optical emission spectroscopy",

author = "Martina Leins and Anderas Schulz and Matthias Walker and Uwe Schumacher and Ulrich Stroth",

note = "Funding Information: Manuscript received November 30, 2007; revised April 4, 2008. This work was supported by the Semiconductor Research Corporation. The authors are with the Universit{\"a}t Stuttgart, 70569 Stuttgart, Germany (e-mail: [email protected]). Digital Object Identifier 10.1109/TPS.2008.924420 Fig. 1. Experimental setup with diagnostics for optical-emission spectroscopy.",

year = "2008",

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doi = "10.1109/TPS.2008.924420",

language = "English",

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pages = "982--983",

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TY - JOUR

T1 - Development and characterization of an atmospheric-pressure microwave plasma torch

AU - Leins, Martina

AU - Schulz, Anderas

AU - Walker, Matthias

AU - Schumacher, Uwe

AU - Stroth, Ulrich

N1 - Funding Information: Manuscript received November 30, 2007; revised April 4, 2008. This work was supported by the Semiconductor Research Corporation. The authors are with the Universität Stuttgart, 70569 Stuttgart, Germany (e-mail: [email protected]). Digital Object Identifier 10.1109/TPS.2008.924420 Fig. 1. Experimental setup with diagnostics for optical-emission spectroscopy.

PY - 2008/8

Y1 - 2008/8

N2 - The presented microwave plasma torch finds application in many areas of treatment and conversion of different gases as well as in surface treatment. The torch is based on an axially symmetric resonator. Microwaves of 2.45 GHz are fed into the cavity, resulting in a sufficient high electric field for ignition and maintaining stable plasma operation. The characterization of the plasma is performed by optical-emission spectroscopy, which revealed a rotational temperature of about 3600 K in the center of the plasma.

AB - The presented microwave plasma torch finds application in many areas of treatment and conversion of different gases as well as in surface treatment. The torch is based on an axially symmetric resonator. Microwaves of 2.45 GHz are fed into the cavity, resulting in a sufficient high electric field for ignition and maintaining stable plasma operation. The characterization of the plasma is performed by optical-emission spectroscopy, which revealed a rotational temperature of about 3600 K in the center of the plasma.

KW - Atmospheric pressure

KW - Decomposition of VOC

KW - Microwave plasma source

KW - Optical emission spectroscopy

UR - https://www.scopus.com/pages/publications/50249095847

U2 - 10.1109/TPS.2008.924420

DO - 10.1109/TPS.2008.924420

M3 - Article

AN - SCOPUS:50249095847

SN - 0093-3813

VL - 36

SP - 982

EP - 983

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 4 PART 1

ER -

Development and characterization of an atmospheric-pressure microwave plasma torch

Abstract

Keywords

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