Determination of temperature coefficients of thin film materials in RF BAW components

A. Tag; R. Weigel; A. Hagelauer; B. Bader; M. Pitschi; K. Wagner

doi:10.1109/GEMIC.2015.7107838

Determination of temperature coefficients of thin film materials in RF BAW components

A. Tag, R. Weigel, A. Hagelauer, B. Bader, M. Pitschi, K. Wagner

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

A new, accurate, and fast approach for determining the temperature coefficients of the thin film materials used in RF BAW components has been developed allowing the precise modeling of BAW components at different ambient temperatures. The presented method is based on the investigation of several resonance frequencies of the resonators with different layer-stacks. The problem of determining the temperature coefficients from broadband resonator simulations and measurements was formulated as an overdetermined linear system of equations and solved by using the weighted least square method. The presented approach has been verified by measurements.

Original language	English
Title of host publication	2015 German Microwave Conference, GeMiC 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	402-405
Number of pages	4
ISBN (Electronic)	9783981266863
DOIs	https://doi.org/10.1109/GEMIC.2015.7107838
State	Published - 13 May 2015
Externally published	Yes
Event	9th German Microwave Conference, GeMiC 2015 - Nuremberg, Germany Duration: 16 Mar 2015 → 18 Mar 2015

Publication series

Name	2015 German Microwave Conference, GeMiC 2015

Conference

Conference	9th German Microwave Conference, GeMiC 2015
Country/Territory	Germany
City	Nuremberg
Period	16/03/15 → 18/03/15

Access to Document

10.1109/GEMIC.2015.7107838

Cite this

Tag, A., Weigel, R., Hagelauer, A., Bader, B., Pitschi, M., & Wagner, K. (2015). Determination of temperature coefficients of thin film materials in RF BAW components. In 2015 German Microwave Conference, GeMiC 2015 (pp. 402-405). Article 7107838 (2015 German Microwave Conference, GeMiC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/GEMIC.2015.7107838

@inproceedings{6ea7bb4c66d04d5882608aca1df2f9c4,

title = "Determination of temperature coefficients of thin film materials in RF BAW components",

abstract = "A new, accurate, and fast approach for determining the temperature coefficients of the thin film materials used in RF BAW components has been developed allowing the precise modeling of BAW components at different ambient temperatures. The presented method is based on the investigation of several resonance frequencies of the resonators with different layer-stacks. The problem of determining the temperature coefficients from broadband resonator simulations and measurements was formulated as an overdetermined linear system of equations and solved by using the weighted least square method. The presented approach has been verified by measurements.",

author = "A. Tag and R. Weigel and A. Hagelauer and B. Bader and M. Pitschi and K. Wagner",

note = "Publisher Copyright: {\textcopyright} 2015 IMA: IMATech e.V.; 9th German Microwave Conference, GeMiC 2015 ; Conference date: 16-03-2015 Through 18-03-2015",

year = "2015",

month = may,

day = "13",

doi = "10.1109/GEMIC.2015.7107838",

language = "English",

series = "2015 German Microwave Conference, GeMiC 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "402--405",

booktitle = "2015 German Microwave Conference, GeMiC 2015",

}

Tag, A, Weigel, R, Hagelauer, A, Bader, B, Pitschi, M & Wagner, K 2015, Determination of temperature coefficients of thin film materials in RF BAW components. in 2015 German Microwave Conference, GeMiC 2015., 7107838, 2015 German Microwave Conference, GeMiC 2015, Institute of Electrical and Electronics Engineers Inc., pp. 402-405, 9th German Microwave Conference, GeMiC 2015, Nuremberg, Germany, 16/03/15. https://doi.org/10.1109/GEMIC.2015.7107838

Determination of temperature coefficients of thin film materials in RF BAW components. / Tag, A.; Weigel, R.; Hagelauer, A. et al.
2015 German Microwave Conference, GeMiC 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 402-405 7107838 (2015 German Microwave Conference, GeMiC 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Determination of temperature coefficients of thin film materials in RF BAW components

AU - Tag, A.

AU - Weigel, R.

AU - Hagelauer, A.

AU - Bader, B.

AU - Pitschi, M.

AU - Wagner, K.

PY - 2015/5/13

Y1 - 2015/5/13

N2 - A new, accurate, and fast approach for determining the temperature coefficients of the thin film materials used in RF BAW components has been developed allowing the precise modeling of BAW components at different ambient temperatures. The presented method is based on the investigation of several resonance frequencies of the resonators with different layer-stacks. The problem of determining the temperature coefficients from broadband resonator simulations and measurements was formulated as an overdetermined linear system of equations and solved by using the weighted least square method. The presented approach has been verified by measurements.

AB - A new, accurate, and fast approach for determining the temperature coefficients of the thin film materials used in RF BAW components has been developed allowing the precise modeling of BAW components at different ambient temperatures. The presented method is based on the investigation of several resonance frequencies of the resonators with different layer-stacks. The problem of determining the temperature coefficients from broadband resonator simulations and measurements was formulated as an overdetermined linear system of equations and solved by using the weighted least square method. The presented approach has been verified by measurements.

UR - http://www.scopus.com/inward/record.url?scp=84934324483&partnerID=8YFLogxK

U2 - 10.1109/GEMIC.2015.7107838

DO - 10.1109/GEMIC.2015.7107838

M3 - Conference contribution

AN - SCOPUS:84934324483

T3 - 2015 German Microwave Conference, GeMiC 2015

SP - 402

EP - 405

BT - 2015 German Microwave Conference, GeMiC 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 9th German Microwave Conference, GeMiC 2015

Y2 - 16 March 2015 through 18 March 2015

ER -

Determination of temperature coefficients of thin film materials in RF BAW components

Abstract

Publication series

Conference

Access to Document

Other files and links

Fingerprint

Cite this