TY - GEN
T1 - Detecting the motion of a microresonator via mode-mode interaction
AU - Westra, H. J.R.
AU - Poot, M.
AU - Van Der Zant, H. S.J.
AU - Venstra, W. J.
PY - 2010
Y1 - 2010
N2 - We demonstrate that a flexural resonance mode of a clamped-clamped beam resonator can be measured by using another resonance mode of the same resonator as a detector. The detector mode and the mode to be detected are coupled through the beam displacement. Displacement of the resonance mode to be measured introduces tension in the beam, which gives rise to an upwards shift in the resonance frequency of the detector mode. We experimentally show that this mechanism can be used to detect the first and second resonance mode of a silicon beam resonator. The modal interaction can also be used to increase the dynamic range of the resonator.
AB - We demonstrate that a flexural resonance mode of a clamped-clamped beam resonator can be measured by using another resonance mode of the same resonator as a detector. The detector mode and the mode to be detected are coupled through the beam displacement. Displacement of the resonance mode to be measured introduces tension in the beam, which gives rise to an upwards shift in the resonance frequency of the detector mode. We experimentally show that this mechanism can be used to detect the first and second resonance mode of a silicon beam resonator. The modal interaction can also be used to increase the dynamic range of the resonator.
UR - http://www.scopus.com/inward/record.url?scp=79951933575&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2010.5690734
DO - 10.1109/ICSENS.2010.5690734
M3 - Conference contribution
AN - SCOPUS:79951933575
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 1047
EP - 1050
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -