@inproceedings{72693f82d563430ea9ae8837ff4903d7,
title = "Designing Capacitive Micromachined Ultrasonic Transducer (CMUT) Based Sensors for Low Frequency Airborne Applications",
abstract = "We introduce a compact model for the prediction of performance figures of CMUTs prospectively used in airborne applications such as flow meters. The model comprises both a mechanical and an electrical approach resulting in a set of four parameters: resonance frequency, Q-factor, static capacitance and pull-in voltage. A small set of exemplary CMUTs has been intensively characterized by means of LDV and LCR measurements, eventually confirming the precision of the proposed prediction model.",
keywords = "CMUT model, Q-factor, airborne ultrasound, capacitance, pull-in voltage, resonance frequency",
author = "Sebastian Peller and Rudolf Bierl and Amelie Hagelauer",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 IEEE Sensors, SENSORS 2024 ; Conference date: 20-10-2024 Through 23-10-2024",
year = "2024",
doi = "10.1109/SENSORS60989.2024.10785117",
language = "English",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 IEEE Sensors, SENSORS 2024 - Conference Proceedings",
}