@inproceedings{fff05828fda04f0d83df0d09cf70b4cf,
title = "Design of a Micropump Based on an Industrial Microphone Manufacturing Process",
abstract = "We present a micro-electro-mechanical pump design, up to one order of magnitude smaller in surface area compared to state-of-the-art solutions. After identifying a standard MEMS microphone manufacturing process as suitable vantage point for the production of an integrated micropump, designs with device edge lengths below 1.9 mm are implemented. Sophisticated finite element simulations including full electro-mechanical-fluidic coupling and mechanical contact are carried out in order to support the development and to identify the most promising and efficient device variants. This approach results in a micropump concept with expected flow rates in the range of 20 μl/min per mm3 device volume.",
keywords = "MEMS, actuator, electrostatic, integrated, process adaptation, pump",
author = "Martin Seidl and Gabriele Schrag and Wolfgang Klein and Matthias Vobl and Ulrich Krumbein",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019 ; Conference date: 12-05-2019 Through 15-05-2019",
year = "2019",
month = may,
doi = "10.1109/DTIP.2019.8752688",
language = "English",
series = "2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019",
}