TY - JOUR
T1 - Design and realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments
AU - Schmehl, Andreas
AU - Mairoser, Thomas
AU - Herrnberger, Alexander
AU - Stephanos, Cyril
AU - Meir, Stefan
AU - Förg, Benjamin
AU - Wiedemann, Birgit
AU - Böni, Peter
AU - Mannhart, Jochen
AU - Kreuzpaintner, Wolfgang
N1 - Publisher Copyright:
© 2017 Elsevier B.V.
PY - 2018/3/1
Y1 - 2018/3/1
N2 - We report on the realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments. Starting with the scientific requirements, which define the general design considerations, the external limitations and boundaries imposed by the available space at a neutron beamline and by the neutron and vacuum compatibility of the used materials, are assessed. The relevant aspects are then accounted for in the realization of our highly mobile deposition system, which was designed with a focus on a quick and simple installation and removability at the beamline. Apart from the general design, the in-vacuum components, the auxiliary equipment and the remote control via a computer, as well as relevant safety aspects are presented in detail.
AB - We report on the realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments. Starting with the scientific requirements, which define the general design considerations, the external limitations and boundaries imposed by the available space at a neutron beamline and by the neutron and vacuum compatibility of the used materials, are assessed. The relevant aspects are then accounted for in the realization of our highly mobile deposition system, which was designed with a focus on a quick and simple installation and removability at the beamline. Apart from the general design, the in-vacuum components, the auxiliary equipment and the remote control via a computer, as well as relevant safety aspects are presented in detail.
KW - In operando
KW - In situ
KW - Mobile deposition system
KW - Polarized neutron reflectometry
KW - Sputter deposition
UR - http://www.scopus.com/inward/record.url?scp=85037975561&partnerID=8YFLogxK
U2 - 10.1016/j.nima.2017.11.086
DO - 10.1016/j.nima.2017.11.086
M3 - Article
AN - SCOPUS:85037975561
SN - 0168-9002
VL - 883
SP - 170
EP - 182
JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
ER -