TY - JOUR
T1 - Design and realization of a sputter deposition system for the in situ and in operando use in polarized neutron reflectometry experiments
T2 - Novel capabilities
AU - Ye, Jingfan
AU - Book, Alexander
AU - Mayr, Sina
AU - Gabold, Henrik
AU - Meng, Fankai
AU - Schäfferer, Helena
AU - Need, Ryan
AU - Gilbert, Dustin
AU - Saerbeck, Thomas
AU - Stahn, Jochen
AU - Böni, Peter
AU - Kreuzpaintner, Wolfgang
N1 - Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2020/6/1
Y1 - 2020/6/1
N2 - Recently, the design and realization of a sputter-deposition system for in situ and in operando polarized neutron reflectometry (PNR) was reported. The device allows magnetic thin films and heterostructures to be grown, while the sample remains aligned in the neutron beam for PNR. By now, it has been applied in experiments that investigated the magnetic and structural properties of thin Fe and Pd/Fe/Pd heterostructures as a function of the layer thickness. Here, we report on significant upgrades of the deposition system with advanced thin film growth and measurement capabilities. These include improvements to the generation of the vacuum to realize ultra-high-vacuum (UHV) conditions. A base pressure below 5 × 10−9mbar can now be obtained within less than one day of pumping time. To allow experiments over a wide range of temperatures, the system was upgraded to include a cryo-furnace. It allows the sample to be cooled or heated in the range of 10K to 1000K for both applications, sample growth and measurement. Further, a new magnetic coil setup with soft iron yoke was designed which can realize a homogeneous in-plane magnetic field of up to 300mT and electric fields at the sample position.
AB - Recently, the design and realization of a sputter-deposition system for in situ and in operando polarized neutron reflectometry (PNR) was reported. The device allows magnetic thin films and heterostructures to be grown, while the sample remains aligned in the neutron beam for PNR. By now, it has been applied in experiments that investigated the magnetic and structural properties of thin Fe and Pd/Fe/Pd heterostructures as a function of the layer thickness. Here, we report on significant upgrades of the deposition system with advanced thin film growth and measurement capabilities. These include improvements to the generation of the vacuum to realize ultra-high-vacuum (UHV) conditions. A base pressure below 5 × 10−9mbar can now be obtained within less than one day of pumping time. To allow experiments over a wide range of temperatures, the system was upgraded to include a cryo-furnace. It allows the sample to be cooled or heated in the range of 10K to 1000K for both applications, sample growth and measurement. Further, a new magnetic coil setup with soft iron yoke was designed which can realize a homogeneous in-plane magnetic field of up to 300mT and electric fields at the sample position.
KW - Film deposition
KW - Instrument
KW - Magnetism
KW - Neutron reflectometry
KW - Sputtering
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85081919512&partnerID=8YFLogxK
U2 - 10.1016/j.nima.2020.163710
DO - 10.1016/j.nima.2020.163710
M3 - Article
AN - SCOPUS:85081919512
SN - 0168-9002
VL - 964
JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
M1 - 163710
ER -