Deposition of YBCO and NBCO films on areas of 9 inches in diameter

B. Utz; R. Semerad; M. Bauer; W. Prusseit; P. Berberich; H. Kinder

doi:10.1109/77.620749

Deposition of YBCO and NBCO films on areas of 9 inches in diameter

B. Utz
, R. Semerad
, M. Bauer
, W. Prusseit
, P. Berberich
, H. Kinder

Department of Physics

Technical University of Munich

Research output: Contribution to journal › Article › peer-review

108 Scopus citations

Abstract

High quality YBa₂Cu₃O₇ thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9″ diameter. A scanning inductive j_C probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm². Surface resistance values are found to be below 500 μΩ @ 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates j_C values of 1.3 MA/cm are achieved as well. The properties of Nd_1-xBa_2+xCu₃O₇ films grown with the same system are presented and evaluated.

Original language	English
Pages (from-to)	1272-1277
Number of pages	6
Journal	IEEE Transactions on Applied Superconductivity
Volume	7
Issue number	2 PART 2
DOIs	https://doi.org/10.1109/77.620749
State	Published - 1997

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abstract = "High quality YBa2Cu3O7 thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9″ diameter. A scanning inductive jC probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm2. Surface resistance values are found to be below 500 μΩ @ 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates jC values of 1.3 MA/cm are achieved as well. The properties of Nd1-xBa2+xCu3O7 films grown with the same system are presented and evaluated.",

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AU - Utz, B.

AU - Semerad, R.

AU - Bauer, M.

AU - Prusseit, W.

AU - Berberich, P.

AU - Kinder, H.

PY - 1997

Y1 - 1997

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AB - High quality YBa2Cu3O7 thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9″ diameter. A scanning inductive jC probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm2. Surface resistance values are found to be below 500 μΩ @ 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates jC values of 1.3 MA/cm are achieved as well. The properties of Nd1-xBa2+xCu3O7 films grown with the same system are presented and evaluated.

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JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2 PART 2

ER -

Deposition of YBCO and NBCO films on areas of 9 inches in diameter

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