Deposition of YBCO and NBCO films on areas of 9 inches in diameter

B. Utz; R. Semerad; M. Bauer; W. Prusseit; P. Berberich; H. Kinder

doi:10.1109/77.620749

Deposition of YBCO and NBCO films on areas of 9 inches in diameter

B. Utz, R. Semerad, M. Bauer, W. Prusseit, P. Berberich, H. Kinder

Department of Physics

Technical University of Munich

Research output: Contribution to journal › Article › peer-review

107 Scopus citations

Abstract

High quality YBa₂Cu₃O₇ thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9″ diameter. A scanning inductive j_C probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm². Surface resistance values are found to be below 500 μΩ @ 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates j_C values of 1.3 MA/cm are achieved as well. The properties of Nd_1-xBa_2+xCu₃O₇ films grown with the same system are presented and evaluated.

Original language	English
Pages (from-to)	1272-1277
Number of pages	6
Journal	IEEE Transactions on Applied Superconductivity
Volume	7
Issue number	2 PART 2
DOIs	https://doi.org/10.1109/77.620749
State	Published - 1997

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@article{7ddc4de6c42048d7b00c84aac20bcafc,

title = "Deposition of YBCO and NBCO films on areas of 9 inches in diameter",

abstract = "High quality YBa2Cu3O7 thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9″ diameter. A scanning inductive jC probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm2. Surface resistance values are found to be below 500 μΩ @ 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates jC values of 1.3 MA/cm are achieved as well. The properties of Nd1-xBa2+xCu3O7 films grown with the same system are presented and evaluated.",

author = "B. Utz and R. Semerad and M. Bauer and W. Prusseit and P. Berberich and H. Kinder",

year = "1997",

doi = "10.1109/77.620749",

language = "English",

volume = "7",

pages = "1272--1277",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2 PART 2",

}

TY - JOUR

T1 - Deposition of YBCO and NBCO films on areas of 9 inches in diameter

AU - Utz, B.

AU - Semerad, R.

AU - Bauer, M.

AU - Prusseit, W.

AU - Berberich, P.

AU - Kinder, H.

PY - 1997

Y1 - 1997

N2 - High quality YBa2Cu3O7 thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9″ diameter. A scanning inductive jC probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm2. Surface resistance values are found to be below 500 μΩ @ 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates jC values of 1.3 MA/cm are achieved as well. The properties of Nd1-xBa2+xCu3O7 films grown with the same system are presented and evaluated.

AB - High quality YBa2Cu3O7 thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9″ diameter. A scanning inductive jC probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm2. Surface resistance values are found to be below 500 μΩ @ 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates jC values of 1.3 MA/cm are achieved as well. The properties of Nd1-xBa2+xCu3O7 films grown with the same system are presented and evaluated.

UR - http://www.scopus.com/inward/record.url?scp=0031162311&partnerID=8YFLogxK

U2 - 10.1109/77.620749

DO - 10.1109/77.620749

M3 - Article

AN - SCOPUS:0031162311

SN - 1051-8223

VL - 7

SP - 1272

EP - 1277

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2 PART 2

ER -

Deposition of YBCO and NBCO films on areas of 9 inches in diameter

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