Abstract
Superconducting quantum interference devices (SQUIDs) can detect tiny amounts of magnetic flux and are also used to study macroscopic quantum effects. We employ a dc SQUID as a linear detector of the displacement of an embedded micromechanical resonator with a femtometer sensitivity. We discuss the measurement method, including operation in high magnetic field and a cryogenic amplification scheme which allows us to reach a resolution which is only a factor 4.4 above the standard quantum limit.
| Original language | English |
|---|---|
| Pages (from-to) | 817-825 |
| Number of pages | 9 |
| Journal | Comptes Rendus Physique |
| Volume | 12 |
| Issue number | 9-10 |
| DOIs | |
| State | Published - Dec 2011 |
| Externally published | Yes |
Keywords
- MEMS
- NEMS
- QEMS
- SQUID
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