Dc SQUIDs as linear displacement detectors for embedded micromechanical resonators

Samir Etaki, Menno Poot, Koji Onomitsu, Hiroshi Yamaguchi, Herre S.J. van der Zant

Research output: Contribution to journalShort surveypeer-review

1 Scopus citations

Abstract

Superconducting quantum interference devices (SQUIDs) can detect tiny amounts of magnetic flux and are also used to study macroscopic quantum effects. We employ a dc SQUID as a linear detector of the displacement of an embedded micromechanical resonator with a femtometer sensitivity. We discuss the measurement method, including operation in high magnetic field and a cryogenic amplification scheme which allows us to reach a resolution which is only a factor 4.4 above the standard quantum limit.

Original languageEnglish
Pages (from-to)817-825
Number of pages9
JournalComptes Rendus Physique
Volume12
Issue number9-10
DOIs
StatePublished - Dec 2011
Externally publishedYes

Keywords

  • MEMS
  • NEMS
  • QEMS
  • SQUID

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