CuO/ZnO nanocomposite gas sensors developed by a plasma-assisted route

Quentin Simon; Davide Barreca; Alberto Gasparotto; Chiara MacCato; Eugenio Tondello; Cinzia Sada; Elisabetta Comini; Giorgio Sberveglieri; Manish Banerjee; Ke Xu; Anjana Devi; Roland A. Fischer

doi:10.1002/cphc.201101062

CuO/ZnO nanocomposite gas sensors developed by a plasma-assisted route

Quentin Simon, Davide Barreca, Alberto Gasparotto, Chiara MacCato, Eugenio Tondello, Cinzia Sada, Elisabetta Comini, Giorgio Sberveglieri, Manish Banerjee, Ke Xu, Anjana Devi, Roland A. Fischer

Research output: Contribution to journal › Article › peer-review

53 Scopus citations

Abstract

CuO/ZnO nanocomposites were synthesized on Al₂O₃ substrates by a hybrid plasma-assisted approach, combining the initial growth of ZnO columnar arrays by plasma-enhanced chemical vapor deposition (PE-CVD) and subsequent radio frequency (RF) sputtering of copper, followed by final annealing in air. Chemical, morphological, and structural analyses revealed the formation of high-purity nanosystems, characterized by a controllable dispersion of CuO particles into ZnO matrices. The high surface-to-volume ratio of the obtained materials, along with intimate CuO/ZnO intermixing, resulted in the efficient detection of various oxidizing and reducing gases (such as O ₃, CH₃CH₂OH, and H₂). The obtained data are critically discussed and interrelated with the chemical and physical properties of the nanocomposites.

Original language	English
Pages (from-to)	2342-2348
Number of pages	7
Journal	ChemPhysChem
Volume	13
Issue number	9
DOIs	https://doi.org/10.1002/cphc.201101062
State	Published - 18 Jun 2012
Externally published	Yes

Keywords

CuO
ZnO
chemical vapor deposition
copper sputtering
gas sensors

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10.1002/cphc.201101062

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title = "CuO/ZnO nanocomposite gas sensors developed by a plasma-assisted route",

abstract = "CuO/ZnO nanocomposites were synthesized on Al2O3 substrates by a hybrid plasma-assisted approach, combining the initial growth of ZnO columnar arrays by plasma-enhanced chemical vapor deposition (PE-CVD) and subsequent radio frequency (RF) sputtering of copper, followed by final annealing in air. Chemical, morphological, and structural analyses revealed the formation of high-purity nanosystems, characterized by a controllable dispersion of CuO particles into ZnO matrices. The high surface-to-volume ratio of the obtained materials, along with intimate CuO/ZnO intermixing, resulted in the efficient detection of various oxidizing and reducing gases (such as O 3, CH3CH2OH, and H2). The obtained data are critically discussed and interrelated with the chemical and physical properties of the nanocomposites.",

keywords = "CuO, ZnO, chemical vapor deposition, copper sputtering, gas sensors",

author = "Quentin Simon and Davide Barreca and Alberto Gasparotto and Chiara MacCato and Eugenio Tondello and Cinzia Sada and Elisabetta Comini and Giorgio Sberveglieri and Manish Banerjee and Ke Xu and Anjana Devi and Fischer, {Roland A.}",

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doi = "10.1002/cphc.201101062",

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T1 - CuO/ZnO nanocomposite gas sensors developed by a plasma-assisted route

AU - Simon, Quentin

AU - Barreca, Davide

AU - Gasparotto, Alberto

AU - MacCato, Chiara

AU - Tondello, Eugenio

AU - Sada, Cinzia

AU - Comini, Elisabetta

AU - Sberveglieri, Giorgio

AU - Banerjee, Manish

AU - Xu, Ke

AU - Devi, Anjana

AU - Fischer, Roland A.

PY - 2012/6/18

Y1 - 2012/6/18

N2 - CuO/ZnO nanocomposites were synthesized on Al2O3 substrates by a hybrid plasma-assisted approach, combining the initial growth of ZnO columnar arrays by plasma-enhanced chemical vapor deposition (PE-CVD) and subsequent radio frequency (RF) sputtering of copper, followed by final annealing in air. Chemical, morphological, and structural analyses revealed the formation of high-purity nanosystems, characterized by a controllable dispersion of CuO particles into ZnO matrices. The high surface-to-volume ratio of the obtained materials, along with intimate CuO/ZnO intermixing, resulted in the efficient detection of various oxidizing and reducing gases (such as O 3, CH3CH2OH, and H2). The obtained data are critically discussed and interrelated with the chemical and physical properties of the nanocomposites.

AB - CuO/ZnO nanocomposites were synthesized on Al2O3 substrates by a hybrid plasma-assisted approach, combining the initial growth of ZnO columnar arrays by plasma-enhanced chemical vapor deposition (PE-CVD) and subsequent radio frequency (RF) sputtering of copper, followed by final annealing in air. Chemical, morphological, and structural analyses revealed the formation of high-purity nanosystems, characterized by a controllable dispersion of CuO particles into ZnO matrices. The high surface-to-volume ratio of the obtained materials, along with intimate CuO/ZnO intermixing, resulted in the efficient detection of various oxidizing and reducing gases (such as O 3, CH3CH2OH, and H2). The obtained data are critically discussed and interrelated with the chemical and physical properties of the nanocomposites.

KW - CuO

KW - ZnO

KW - chemical vapor deposition

KW - copper sputtering

KW - gas sensors

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DO - 10.1002/cphc.201101062

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SP - 2342

EP - 2348

JO - ChemPhysChem

JF - ChemPhysChem

IS - 9

ER -

CuO/ZnO nanocomposite gas sensors developed by a plasma-assisted route

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Keywords

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