CuO/ZnO nanocomposite gas sensors developed by a plasma-assisted route

Quentin Simon, Davide Barreca, Alberto Gasparotto, Chiara MacCato, Eugenio Tondello, Cinzia Sada, Elisabetta Comini, Giorgio Sberveglieri, Manish Banerjee, Ke Xu, Anjana Devi, Roland A. Fischer

Research output: Contribution to journalArticlepeer-review

53 Scopus citations


CuO/ZnO nanocomposites were synthesized on Al2O3 substrates by a hybrid plasma-assisted approach, combining the initial growth of ZnO columnar arrays by plasma-enhanced chemical vapor deposition (PE-CVD) and subsequent radio frequency (RF) sputtering of copper, followed by final annealing in air. Chemical, morphological, and structural analyses revealed the formation of high-purity nanosystems, characterized by a controllable dispersion of CuO particles into ZnO matrices. The high surface-to-volume ratio of the obtained materials, along with intimate CuO/ZnO intermixing, resulted in the efficient detection of various oxidizing and reducing gases (such as O 3, CH3CH2OH, and H2). The obtained data are critically discussed and interrelated with the chemical and physical properties of the nanocomposites.

Original languageEnglish
Pages (from-to)2342-2348
Number of pages7
Issue number9
StatePublished - 18 Jun 2012
Externally publishedYes


  • CuO
  • ZnO
  • chemical vapor deposition
  • copper sputtering
  • gas sensors


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