TY - GEN
T1 - Coupled-field modeling of microdevices and microsystems
AU - Wachutka, G.
N1 - Publisher Copyright:
© 2002 Japan Soc. of Applied Physics.
PY - 2002
Y1 - 2002
N2 - Currently strong efforts are being made to build simulation platforms for the predictive simulation of microelectromechanical devices and microsystems (MEMS) as cost-effective and time-saving alternative to the traditional experimental approach. Already today the rapid progress in microsystems technology is strongly supported by MEMS-specific modeling methodologies and dedicated simulation tools constituting a "virtual laboratory" on the computer, which enables the visualization and detailed analysis of the operating behavior of single microdevices as well as their collaborative function in a microsystem. In this context, one of the most important aspects is the consistent treatment of coupled fields and coupled energy and signal domains required for deriving macromodels of microsystems from the continuous field level. To this end, we discuss practicable methodologies for setting up physically-based consistent microdevice and full system models for the effort-economizing and yet accurate numerical simulation of micro-mechatronical components and systems.
AB - Currently strong efforts are being made to build simulation platforms for the predictive simulation of microelectromechanical devices and microsystems (MEMS) as cost-effective and time-saving alternative to the traditional experimental approach. Already today the rapid progress in microsystems technology is strongly supported by MEMS-specific modeling methodologies and dedicated simulation tools constituting a "virtual laboratory" on the computer, which enables the visualization and detailed analysis of the operating behavior of single microdevices as well as their collaborative function in a microsystem. In this context, one of the most important aspects is the consistent treatment of coupled fields and coupled energy and signal domains required for deriving macromodels of microsystems from the continuous field level. To this end, we discuss practicable methodologies for setting up physically-based consistent microdevice and full system models for the effort-economizing and yet accurate numerical simulation of micro-mechatronical components and systems.
KW - Analytical models
KW - Collaborative tools
KW - Computational modeling
KW - Computer simulation
KW - Laboratories
KW - Microelectromechanical devices
KW - Micromechanical devices
KW - Numerical simulation
KW - Predictive models
KW - Visualization
UR - http://www.scopus.com/inward/record.url?scp=67650544162&partnerID=8YFLogxK
U2 - 10.1109/SISPAD.2002.1034505
DO - 10.1109/SISPAD.2002.1034505
M3 - Conference contribution
AN - SCOPUS:67650544162
T3 - International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
SP - 9
EP - 14
BT - 2002 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2002
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2002
Y2 - 4 September 2002 through 6 September 2002
ER -