Correlation of experimental and numerical results on electrostatically actuated micro-beams

V. Rochus; D. J. Rixen; J. C. Golinval

Correlation of experimental and numerical results on electrostatically actuated micro-beams

V. Rochus
, D. J. Rixen
, J. C. Golinval

University of Liège
Delft University of Technology

Research output: Contribution to conference › Paper › peer-review

Abstract

The aim of this paper is to validate numerical simulations of electromechanical coupling in micro-structures using some experimental results. The micro-structures studied here consist in a micro-bridge and two cantilever micro-beams. Multi-physics models of micro-electromechanical systems (MEMS) based on the finite element method (FEM) are used to model the strongly coupled electro-mechanical interactions and to perform static analyses taking into account large displacements. In all the cases treated here the numerical results are in very good agreement with the experimental results.

Original language	English
Pages	538-541
Number of pages	4
State	Published - 2006
Externally published	Yes
Event	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA, United States Duration: 7 May 2006 → 11 May 2006

Conference

Conference	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Country/Territory	United States
City	Boston, MA
Period	7/05/06 → 11/05/06

Keywords

Electro-mechanical coupling
Experimental validation
Finite element method
Multi-physics model
Non-linear systems

Cite this

@conference{16eccfef8d2e4af3a8c65ede54af1ac9,

title = "Correlation of experimental and numerical results on electrostatically actuated micro-beams",

abstract = "The aim of this paper is to validate numerical simulations of electromechanical coupling in micro-structures using some experimental results. The micro-structures studied here consist in a micro-bridge and two cantilever micro-beams. Multi-physics models of micro-electromechanical systems (MEMS) based on the finite element method (FEM) are used to model the strongly coupled electro-mechanical interactions and to perform static analyses taking into account large displacements. In all the cases treated here the numerical results are in very good agreement with the experimental results.",

keywords = "Electro-mechanical coupling, Experimental validation, Finite element method, Multi-physics model, Non-linear systems",

author = "V. Rochus and Rixen, \{D. J.\} and Golinval, \{J. C.\}",

year = "2006",

language = "English",

pages = "538--541",

note = "2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings ; Conference date: 07-05-2006 Through 11-05-2006",

}

TY - CONF

T1 - Correlation of experimental and numerical results on electrostatically actuated micro-beams

AU - Rochus, V.

AU - Rixen, D. J.

AU - Golinval, J. C.

PY - 2006

Y1 - 2006

N2 - The aim of this paper is to validate numerical simulations of electromechanical coupling in micro-structures using some experimental results. The micro-structures studied here consist in a micro-bridge and two cantilever micro-beams. Multi-physics models of micro-electromechanical systems (MEMS) based on the finite element method (FEM) are used to model the strongly coupled electro-mechanical interactions and to perform static analyses taking into account large displacements. In all the cases treated here the numerical results are in very good agreement with the experimental results.

AB - The aim of this paper is to validate numerical simulations of electromechanical coupling in micro-structures using some experimental results. The micro-structures studied here consist in a micro-bridge and two cantilever micro-beams. Multi-physics models of micro-electromechanical systems (MEMS) based on the finite element method (FEM) are used to model the strongly coupled electro-mechanical interactions and to perform static analyses taking into account large displacements. In all the cases treated here the numerical results are in very good agreement with the experimental results.

KW - Electro-mechanical coupling

KW - Experimental validation

KW - Finite element method

KW - Multi-physics model

KW - Non-linear systems

UR - https://www.scopus.com/pages/publications/33845200850

M3 - Paper

AN - SCOPUS:33845200850

SP - 538

EP - 541

T2 - 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings

Y2 - 7 May 2006 through 11 May 2006

ER -

Correlation of experimental and numerical results on electrostatically actuated micro-beams

Abstract

Conference

Keywords

Other files and links

Fingerprint

Cite this