Abstract
The aim of this paper is to validate numerical simulations of electromechanical coupling in micro-structures using some experimental results. The micro-structures studied here consist in a micro-bridge and two cantilever micro-beams. Multi-physics models of micro-electromechanical systems (MEMS) based on the finite element method (FEM) are used to model the strongly coupled electro-mechanical interactions and to perform static analyses taking into account large displacements. In all the cases treated here the numerical results are in very good agreement with the experimental results.
| Original language | English |
|---|---|
| Pages | 538-541 |
| Number of pages | 4 |
| State | Published - 2006 |
| Externally published | Yes |
| Event | 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA, United States Duration: 7 May 2006 → 11 May 2006 |
Conference
| Conference | 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings |
|---|---|
| Country/Territory | United States |
| City | Boston, MA |
| Period | 7/05/06 → 11/05/06 |
Keywords
- Electro-mechanical coupling
- Experimental validation
- Finite element method
- Multi-physics model
- Non-linear systems