Coplanar millimeterwave resonator on silicon

Sebastian Sattler, Tilman Felgentreff, Peter Russer

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

A CPW resonator in completely coplanar technique is built on grounded silicon substrate and the input impedance is investigated experimentally and numerically. The passive planar structure is extensively studied using a space-domain full-wave analysis method. The resonator is fed by a coplanar transmission line through a capacitive gap and shows a marked resonance at the fundamental coplanar waveguide mode. Calculated data and measured data agree better than 5%.

Original languageEnglish
Title of host publicationProc 1993 IEEE Microwave Millimeter Wave Monolithic Circ Symp
EditorsMahesh Kumar
PublisherPubl by IEEE
Pages57-60
Number of pages4
ISBN (Print)0780313232
StatePublished - 1993
EventProceedings of the 1993 IEEE Microwave and Millimeter-Wave Monolithic Circuits Symposium - Atlanta, GA, USA
Duration: 14 Jun 199315 Jun 1993

Publication series

NameProc 1993 IEEE Microwave Millimeter Wave Monolithic Circ Symp

Conference

ConferenceProceedings of the 1993 IEEE Microwave and Millimeter-Wave Monolithic Circuits Symposium
CityAtlanta, GA, USA
Period14/06/9315/06/93

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