TY - JOUR
T1 - Continuously tunable, polarization stable SWG MEMS VCSELs at 1.55 μ m
AU - Grundl, Tobias
AU - Zogal, Karolina
AU - Debernardi, Pierluigi
AU - Muller, Michael
AU - Grasse, Christian
AU - Geiger, Kathrin
AU - Meyer, Ralf
AU - Bohm, Gerhard
AU - Amann, Markus Christian
AU - Kuppers, Franko
AU - Meissner, Peter
PY - 2013
Y1 - 2013
N2 - We present polarization stable, tunable long-wavelength vertical-cavity-surface-emitting lasers (VCSELs) at 1.55 μ m based on InP. The tuning is accomplished by a two-chip membrane mounting technique denoted as bulk-micro-machining. The membrane consists of a GaAs-based distributed Bragg reflector and represents the top mirror. By its electro thermal actuation, cavity tuning occurs. This results in a continuous wavelength shift. Polarization stability is achieved by an implemented semiconductor/air subwavelength grating (SWG) written in the top-most layers of the membrane facing the VCSEL eye after mounting process. The SWG integration is realized by a combination of holographic lithography, barrel, and reactive ion etching. The manufactured micro-electro-mechanical-system SWG-VCSELs show a continuous, polarization stable wavelength tuning of ∼ 25 nm with a peak optical power of 4 mW fiber-coupled in an MMF and thresholds of 3-3.5 mA.
AB - We present polarization stable, tunable long-wavelength vertical-cavity-surface-emitting lasers (VCSELs) at 1.55 μ m based on InP. The tuning is accomplished by a two-chip membrane mounting technique denoted as bulk-micro-machining. The membrane consists of a GaAs-based distributed Bragg reflector and represents the top mirror. By its electro thermal actuation, cavity tuning occurs. This results in a continuous wavelength shift. Polarization stability is achieved by an implemented semiconductor/air subwavelength grating (SWG) written in the top-most layers of the membrane facing the VCSEL eye after mounting process. The SWG integration is realized by a combination of holographic lithography, barrel, and reactive ion etching. The manufactured micro-electro-mechanical-system SWG-VCSELs show a continuous, polarization stable wavelength tuning of ∼ 25 nm with a peak optical power of 4 mW fiber-coupled in an MMF and thresholds of 3-3.5 mA.
KW - InP
KW - micro-electro- mechanical-system (MEMS)
KW - subwavelength grating
KW - tunable
KW - vertical-cavity-surface-emitting laser (VCSEL)
UR - http://www.scopus.com/inward/record.url?scp=84876788056&partnerID=8YFLogxK
U2 - 10.1109/LPT.2013.2250276
DO - 10.1109/LPT.2013.2250276
M3 - Article
AN - SCOPUS:84876788056
SN - 1041-1135
VL - 25
SP - 841
EP - 843
JO - IEEE Photonics Technology Letters
JF - IEEE Photonics Technology Letters
IS - 9
M1 - 6472020
ER -