Continuous YBa2Cu3O7-δ film deposition by optically controlled reactive thermal co-evaporation

B. Utz; S. Rieder-Zecha; H. Kinder

doi:10.1109/77.620706

Continuous YBa₂Cu₃O_7-δ film deposition by optically controlled reactive thermal co-evaporation

B. Utz, S. Rieder-Zecha, H. Kinder

Department of Physics

Technical University of Munich

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

We built a thermal co-evaporation system to deposit YBCO films on large areas in a continuous process which requires some basic modifications to the established standard co-evaporation setup. An optical rate control system based on atomic absorption spectroscopy has been developed to measure the indiviual metal fluxes. In addition the metal sources can be reloaded in-situ for long times. The performance of these new components is discussed and results of first YBCO films grown on small samples are shown.

Original language	English
Pages (from-to)	1181-1184
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	7
Issue number	2 PART 2
DOIs	https://doi.org/10.1109/77.620706
State	Published - 1997

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Continuous YBa₂Cu₃O_7-δ film deposition by optically controlled reactive thermal co-evaporation

Abstract

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