Contact block reduction method and its application to a 10 nm MOSFET device

Denis Mamaluy, Anand Mannargudi, Dragica Vasileska, Matthias Sabathil, Peter Vogl

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Fingerprint

Dive into the research topics of 'Contact block reduction method and its application to a 10 nm MOSFET device'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science

Physics