TY - GEN
T1 - Conductive AFM of transfer printed nano devices
AU - Weiler, Benedikt
AU - Bareiss, Mario
AU - Kalblein, Daniel
AU - Zschieschang, Ute
AU - Klauk, Hagen
AU - Scarpa, Giuseppe
AU - Fabel, Bernhard
AU - Porod, Wolfgang
AU - Lugli, Paolo
PY - 2012
Y1 - 2012
N2 - Nano diodes show great potential for applications in detectors, communications and energy harvesting. However, to make them suitable for low-cost mass production, these nano devices have to be fabricated reliably over large areas while minimizing process time and costs. Printing techniques are promising candidates to overcome these economical drawbacks of conventional nanolithography without a significant loss in structure quality. In this work, we focus on nano transfer printing (nTP) to fabricate nm-scale diodes over extensive areas. Using a temperature-enhanced process, several millions of diodes were transfer-printed in one single step. We show the reliable transfer of functioning Schottky and MIM diodes of different sizes, which demonstrates the versatility and usability of our approach (nTP), paving the way to numerous applications in the fields of e.g. infrared detection or energy harvesting. The nano devices are characterized electrically by conductive Atomic Force Microscopy (c-AFM) measurements. For these MIM structures, quantum-mechanical tunneling was determined to be the main conduction mechanism across the metal-oxide-metal junction.
AB - Nano diodes show great potential for applications in detectors, communications and energy harvesting. However, to make them suitable for low-cost mass production, these nano devices have to be fabricated reliably over large areas while minimizing process time and costs. Printing techniques are promising candidates to overcome these economical drawbacks of conventional nanolithography without a significant loss in structure quality. In this work, we focus on nano transfer printing (nTP) to fabricate nm-scale diodes over extensive areas. Using a temperature-enhanced process, several millions of diodes were transfer-printed in one single step. We show the reliable transfer of functioning Schottky and MIM diodes of different sizes, which demonstrates the versatility and usability of our approach (nTP), paving the way to numerous applications in the fields of e.g. infrared detection or energy harvesting. The nano devices are characterized electrically by conductive Atomic Force Microscopy (c-AFM) measurements. For these MIM structures, quantum-mechanical tunneling was determined to be the main conduction mechanism across the metal-oxide-metal junction.
KW - Conductive AFM
KW - Metal-oxide-metal diodes
KW - Nano transfer printing
KW - Ordered nanostructures
UR - http://www.scopus.com/inward/record.url?scp=84869199662&partnerID=8YFLogxK
U2 - 10.1109/NANO.2012.6322016
DO - 10.1109/NANO.2012.6322016
M3 - Conference contribution
AN - SCOPUS:84869199662
SN - 9781467321983
T3 - Proceedings of the IEEE Conference on Nanotechnology
BT - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
T2 - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
Y2 - 20 August 2012 through 23 August 2012
ER -