Complementary metal oxide semiconductor compatible silicon nanowires-on-a-chip: Fabrication and preclinical validation for the detection of a cancer prognostic protein marker in serum

Duy P. Tran, Bernhard Wolfrum, Regina Stockmann, Jing Hong Pai, Mohammad Pourhassan-Moghaddam, Andreas Offenhäusser, Benjamin Thierry

Research output: Contribution to journalArticlepeer-review

28 Scopus citations

Abstract

An integrated translational biosensing technology based on arrays of silicon nanowire field-effect transistors (SiNW FETs) is described and has been preclinically validated for the ultrasensitive detection of the cancer biomarker ALCAM in serum. High-quality SiNW arrays have been rationally designed toward their implementation as molecular biosensors. The FET sensing platform has been fabricated using a complementary metal oxide semiconductor (CMOS)-compatible process. Reliable and reproducible electrical performance has been demonstrated via electrical characterization using a custom-designed portable readout device. Using this platform, the cancer prognostic marker ALCAM could be detected in serum with a detection limit of 15.5 pg/mL. Importantly, the detection could be completed in less than 30 min and span a wide dynamic detection range (∼105). The SiNW-on-a-chip biosensing technology paves the way to the translational clinical application of FET in the detection of cancer protein markers.

Original languageEnglish
Pages (from-to)1662-1668
Number of pages7
JournalAnalytical Chemistry
Volume87
Issue number3
DOIs
StatePublished - 3 Feb 2015
Externally publishedYes

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