Compact MEMS modeling for design studies

A method for MEMS macromodel development is presented which is based on a physical device description to obtain mathematical relations for the device operation. Since design and technology parameters are input parameters of the resulting model, this method is well suited for design studies. As a benchmark problem, we refer to the macromodel of a micropump driven by an electrostatically actuated membrane. For the calibration of the pertinent compact models, an established parameter extraction software and circuit simulator have been interlinked and, additionally, combined with new MEMS-dedicated extraction routines for quasistatic and transient analysis, thereby forming a powerful, easy-to-use analysis and design platform.