@inproceedings{54218e8e0fb34c3ba81862bbadc22cea,
title = "Combined device- and system-level simulation of RF MEMS switches",
abstract = "We present two problem-adapted modeling approaches for RF-MEMS switches which, in principle, are applicable to any capacitive MEMS device and combine device-level with system-level modeling techniques. The first model has been tailored for detailed investigations on device-level (problem-adapted finite element (FE) model), while the second approach is suited for system-level simulation on the basis of macromodels. Both approaches enable the efficient, but yet physics-based simulation of basic device characteristics; this is demonstrated by comparing the simulation results of the RF MEMS switch designs with optical measurements of their static and dynamic operation.",
keywords = "Finite element modeling, RF MEMS switch, System-level modeling, Tailored modeling",
author = "Gabriele Schr{\"a}g and Thomas K{\"u}nzig and Martin Niessner and G. Wachutka",
year = "2016",
language = "English",
series = "Advanced Materials - TechConnect Briefs 2016",
publisher = "TechConnect",
pages = "95--98",
editor = "Bart Romanowicz and Matthew Laudon and Fiona Case and Fiona Case and Bart Romanowicz",
booktitle = "Advanced Manufacturing, Electronics and Microsystems - TechConnect Briefs 2016",
note = "10th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 19th Annual Nanotech Conference and Expo, and the 2016 National SBIR/STTR Conference ; Conference date: 22-05-2016 Through 25-05-2016",
}