Colour detection using amorphous semiconductor thin-film alloys

J. Wind, G. Krötz, R. Schmiedgen, W. Legner, V. Hechtenberg, G. Müller

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

The optical and opto-electronic properties of amorphous silicon-based semiconductor alloy films have been used to construct colour- sensing devices in combination with conventional silicon photodetectors. It is shown that these films can be used either in a passively or an actively filtering mode, with the first mode allowing for spectrally dispersive colour sensing and the second for the sensing of small relative changes with sub-nanometre resolution. The fabrication and properties of such sensors are described and potential applications with regard to the measurement of non-optical quantities are pointed out.

Original languageEnglish
Pages (from-to)187-192
Number of pages6
JournalSensors and Actuators, A: Physical
Volume36
Issue number3
DOIs
StatePublished - May 1993
Externally publishedYes

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