Circuit electromechanics with a non-metallized nanobeam

M. Pernpeintner; T. Faust; F. Hocke; J. P. Kotthaus; E. M. Weig; H. Huebl; R. Gross

doi:10.1063/1.4896419

Circuit electromechanics with a non-metallized nanobeam

M. Pernpeintner, T. Faust, F. Hocke, J. P. Kotthaus, E. M. Weig, H. Huebl, R. Gross

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

We have realized a nano-electromechanical hybrid system consisting of a silicon nitride beam dielectrically coupled to a superconducting microwave resonator. We characterize the sample by making use of the Duffing nonlinearity of the strongly driven beam. In particular, we calibrate the amplitude spectrum of the mechanical motion and determine the electromechanical vacuum coupling. A high quality factor of 480 000 at a resonance frequency of 14 MHz is achieved at 0.5 K. The experimentally determined electromechanical vacuum coupling of 11.5 mHz is quantitatively compared with finite element based model calculations.

Original language	English
Article number	123106
Journal	Applied Physics Letters
Volume	105
Issue number	12
DOIs	https://doi.org/10.1063/1.4896419
State	Published - 22 Sep 2014
Externally published	Yes

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title = "Circuit electromechanics with a non-metallized nanobeam",

abstract = "We have realized a nano-electromechanical hybrid system consisting of a silicon nitride beam dielectrically coupled to a superconducting microwave resonator. We characterize the sample by making use of the Duffing nonlinearity of the strongly driven beam. In particular, we calibrate the amplitude spectrum of the mechanical motion and determine the electromechanical vacuum coupling. A high quality factor of 480 000 at a resonance frequency of 14 MHz is achieved at 0.5 K. The experimentally determined electromechanical vacuum coupling of 11.5 mHz is quantitatively compared with finite element based model calculations.",

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AU - Pernpeintner, M.

AU - Faust, T.

AU - Hocke, F.

AU - Kotthaus, J. P.

AU - Weig, E. M.

AU - Huebl, H.

AU - Gross, R.

PY - 2014/9/22

Y1 - 2014/9/22

N2 - We have realized a nano-electromechanical hybrid system consisting of a silicon nitride beam dielectrically coupled to a superconducting microwave resonator. We characterize the sample by making use of the Duffing nonlinearity of the strongly driven beam. In particular, we calibrate the amplitude spectrum of the mechanical motion and determine the electromechanical vacuum coupling. A high quality factor of 480 000 at a resonance frequency of 14 MHz is achieved at 0.5 K. The experimentally determined electromechanical vacuum coupling of 11.5 mHz is quantitatively compared with finite element based model calculations.

AB - We have realized a nano-electromechanical hybrid system consisting of a silicon nitride beam dielectrically coupled to a superconducting microwave resonator. We characterize the sample by making use of the Duffing nonlinearity of the strongly driven beam. In particular, we calibrate the amplitude spectrum of the mechanical motion and determine the electromechanical vacuum coupling. A high quality factor of 480 000 at a resonance frequency of 14 MHz is achieved at 0.5 K. The experimentally determined electromechanical vacuum coupling of 11.5 mHz is quantitatively compared with finite element based model calculations.

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VL - 105

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 12

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ER -

Circuit electromechanics with a non-metallized nanobeam

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